Time evolution of plasma parameters in the ignition process of an Ar RF-CCP plasma discharge, simulated by PIC-MCC

Datasets related to the simulation of the time evolution of electron density and other plasma parameters in an Ar RF-CCP discharge with parallalel square electrodes (distance 20 mm) working at pressures in renge 400-600 mTorr,  RF peak bias voltages 100-400 V and RF bias frequencies 10-30 MHz.  

Each file contains several directories, each one containing the output of a single simulation run.

These are the names of the files contained in each subdirectory and their content:

• ccpla.conf : configuration used for the simulation
• ccpla.info : information about the simulation run
• ccpla.neutrals: neutral gas characteristics
• ccpla.V.csv : electric potential (each row is related to a different time)
• ccpla_eedf.csv : electron energy distribution (each row is related to a different time)
• ccpla_iedf_Ar+.csv : ion energy distribution (each row is related to a different time)
• ccpla_means_ele.csv : several electron properties (each row is related to a different time)
• ccpla_means_ion_A+.csv : several ion properties (each row is related to a different time)
• ccpla_potnetial.csv : spatial distribution of the electric potential along the direction normal to the electrodes
• ccpla_zpos_ele.csv : position of the electrons along the direction normal to the electrodes
• ccpla_zpos_ions_Ar+.csv : position of the ions along the direction normal to the electrodes