Raw Data for Article: Time-of-Flight Scanning Transmission Ion Microscopy with High Energy Resolution in the Low keV Range

This dataset contains both experimental and simulation data for ions transmitted through thin metallic films. The thin films are made of Pd, Pt, and Au. The ToF-STIM Experimental Data.zip folder contains the experimental data and the SRIM Simulation Data.zip folder contains simulation data. The Supplemental Material Data.zip folder contains a mix of both experimental and simulation data, as well as a voltage scan across the pulsing aperture for the ion column used to generate the experimental data.

To learn more about these datasets, please read the associated article.

Experimental Data

The experimental data is collected from films produced by Substratek. The experimental datasets contain information about sample position, detector position, and time-of-flight. The time values are binned such that they need to be multiplied by a factor of 6.85871E-12 s to get the time in seconds.

Below is an example of one of the experimental files (with labeled headers):

Simulation Data

The simulation data was created using the Monte Carlo binary collision approximation (MC-BCA) software Stopping and Range of Ions in Matter (SRIM). The simulations were all performed using 25 keV He ions for 100k ions. Each element folder contains 5 sub-folders for various thicknesses (3 nm, 6 nm, 9 nm, 12 nm, 15 nm). Within these sub-folders is the TRIMIN.SAV file, which can be used to recreate the full simulation using SRIM 2013. The other file is the TRANSMIT.TXT output file from the SRIM simulation, which contains the energies and trajectories for all of the transmitted ions.